Regina Soufli

Summary

Affiliation: Lawrence Livermore National Laboratory
Country: USA

Publications

  1. ncbi request reprint Atomic force microscopy characterization of Zerodur mirror substrates for the extreme ultraviolet telescopes aboard NASA's Solar Dynamics Observatory
    Regina Soufli
    Lawrence Livermore National Laboratory, Livermore, California 94550, USA
    Appl Opt 46:3156-63. 2007
  2. doi request reprint Development and calibration of mirrors and gratings for the soft x-ray materials science beamline at the Linac Coherent Light Source free-electron laser
    Regina Soufli
    Lawrence Livermore National Laboratory, Livermore, California 94550, USA
    Appl Opt 51:2118-28. 2012
  3. ncbi request reprint Sub-diffraction-limited multilayer coatings for the 0.3 numerical aperture micro-exposure tool for extreme ultraviolet lithography
    Regina Soufli
    Lawrence Livermore National Laboratory, Livermore, California 94550, USA
    Appl Opt 46:3736-46. 2007
  4. doi request reprint Triple-wavelength, narrowband Mg/SiC multilayers with corrosion barriers and high peak reflectance in the 25-80 nm wavelength region
    Mónica Fernández-Perea
    Lawrence Livermore National Laboratory, 7000 East Avenue, Livermore, CA 94550, USA
    Opt Express 20:24018-29. 2012
  5. ncbi request reprint Optical constants of magnetron-sputtered boron carbide thin films from photoabsorption data in the range 30 to 770 eV
    Regina Soufli
    Lawrence Livermore National Laboratory, 7000 East Avenue, Livermore, California 94550
    Appl Opt 47:4633-9. 2008
  6. ncbi request reprint Physics of reflective optics for the soft gamma-ray photon energy range
    Mónica Fernández-Perea
    Lawrence Livermore National Laboratory LLNL, 7000 East Avenue, Livermore, California 94550, USA
    Phys Rev Lett 111:027404. 2013

Collaborators

  • Mónica Fernández-Perea
  • Jennifer Alameda
  • Sherry L Baker
  • Marie Anne Descalle
  • Tom J McCarville
  • Finn E Christensen
  • Veijo Honkimaki
  • Anders C Jakobsen
  • Eric Ziegler
  • Klaus P Ziock
  • Michael J Pivovaroff
  • Eric M Gullikson
  • Jeff C Robinson
  • Juan I Larruquert
  • Luis Rodríguez-de Marcos
  • Jose A Mendez

Detail Information

Publications6

  1. ncbi request reprint Atomic force microscopy characterization of Zerodur mirror substrates for the extreme ultraviolet telescopes aboard NASA's Solar Dynamics Observatory
    Regina Soufli
    Lawrence Livermore National Laboratory, Livermore, California 94550, USA
    Appl Opt 46:3156-63. 2007
    ..Theoretical predictions of the mirror performance based on the AFM-measured high-spatial-frequency roughness are in good agreement with EUV reflectance measurements of the mirrors after multilayer coating...
  2. doi request reprint Development and calibration of mirrors and gratings for the soft x-ray materials science beamline at the Linac Coherent Light Source free-electron laser
    Regina Soufli
    Lawrence Livermore National Laboratory, Livermore, California 94550, USA
    Appl Opt 51:2118-28. 2012
    ..This is to our knowledge the first time B4C-coated diffraction gratings are demonstrated for operation in the soft x-ray region...
  3. ncbi request reprint Sub-diffraction-limited multilayer coatings for the 0.3 numerical aperture micro-exposure tool for extreme ultraviolet lithography
    Regina Soufli
    Lawrence Livermore National Laboratory, Livermore, California 94550, USA
    Appl Opt 46:3736-46. 2007
    ..07 waves rms). This work is an experimental demonstration of sub-diffraction- limited multilayer coatings for high-NA EUV imaging systems, which resulted in the highest resolution microfield EUV images to date...
  4. doi request reprint Triple-wavelength, narrowband Mg/SiC multilayers with corrosion barriers and high peak reflectance in the 25-80 nm wavelength region
    Mónica Fernández-Perea
    Lawrence Livermore National Laboratory, 7000 East Avenue, Livermore, CA 94550, USA
    Opt Express 20:24018-29. 2012
    ....
  5. ncbi request reprint Optical constants of magnetron-sputtered boron carbide thin films from photoabsorption data in the range 30 to 770 eV
    Regina Soufli
    Lawrence Livermore National Laboratory, 7000 East Avenue, Livermore, California 94550
    Appl Opt 47:4633-9. 2008
    ....
  6. ncbi request reprint Physics of reflective optics for the soft gamma-ray photon energy range
    Mónica Fernández-Perea
    Lawrence Livermore National Laboratory LLNL, 7000 East Avenue, Livermore, California 94550, USA
    Phys Rev Lett 111:027404. 2013
    ..Our results open up new possibilities of reflective optical designs in a spectral range where only diffractive optics (crystals and lenses) and crystal monochromators have been available until now. ..