Shiguang Li

Summary

Affiliation: Nanyang Technological University
Country: Singapore

Publications

  1. doi request reprint Measurement of buried undercut structures in microfluidic devices by laser fluorescent confocal microscopy
    Shiguang Li
    Singapore MIT Alliance, N3 2 01 36, 65 Nanyang Drive, Singapore 637460
    Appl Opt 48:6432-41. 2009
  2. ncbi request reprint Three dimensional sidewall measurements by laser fluorescent confocal microscopy
    Shiguang Li
    Singapore MIT Alliance, N3 2 01 36, 65 Nanyang Drive, Singapore 637460
    Opt Express 16:4001-14. 2008
  3. doi request reprint Microvalve thickness and topography measurements in microfluidic devices by white-light confocal microscopy
    Shiguang Li
    Singapore Masschusetts Institute of Technology Alliance, N3 2 01 36, 65 Nanyang Drive, Singapore 637460
    Appl Opt 48:5088-94. 2009
  4. doi request reprint Feasibility study on bonding quality inspection of microfluidic devices by optical coherence tomography
    Shiguang Li
    Singapore MIT Alliance, N3 2 01 36, 65 Nanyang Drive, Singapore
    J Biomed Opt 16:066011. 2011

Detail Information

Publications4

  1. doi request reprint Measurement of buried undercut structures in microfluidic devices by laser fluorescent confocal microscopy
    Shiguang Li
    Singapore MIT Alliance, N3 2 01 36, 65 Nanyang Drive, Singapore 637460
    Appl Opt 48:6432-41. 2009
    ..The impact of material wettability and the refractive index (n) mismatch among the liquid, samples, cover layer, and objective on the measurement accuracy are experimentally investigated...
  2. ncbi request reprint Three dimensional sidewall measurements by laser fluorescent confocal microscopy
    Shiguang Li
    Singapore MIT Alliance, N3 2 01 36, 65 Nanyang Drive, Singapore 637460
    Opt Express 16:4001-14. 2008
    ..This technique has demonstrated the capability for measuring of 3D geometry of various concave features, such as vertical, buried and other micro channels with sub-mum (RMS) measurement accuracy and repeatability...
  3. doi request reprint Microvalve thickness and topography measurements in microfluidic devices by white-light confocal microscopy
    Shiguang Li
    Singapore Masschusetts Institute of Technology Alliance, N3 2 01 36, 65 Nanyang Drive, Singapore 637460
    Appl Opt 48:5088-94. 2009
    ..With this technique, the microvalve thicknesses before and after bonding were characterized with submicrometer measurement sensitivity and about 1 microm measurement accuracy...
  4. doi request reprint Feasibility study on bonding quality inspection of microfluidic devices by optical coherence tomography
    Shiguang Li
    Singapore MIT Alliance, N3 2 01 36, 65 Nanyang Drive, Singapore
    J Biomed Opt 16:066011. 2011
    ..The defects of geometry deformation and sealing completeness are emphasized during measurements. Based on the inspection results, some discoveries related to the production of microfluidic devices are discussed...