- Three dimensional sidewall measurements by laser fluorescent confocal microscopyShiguang Li
Singapore MIT Alliance, N3 2 01 36, 65 Nanyang Drive, Singapore 637460
Opt Express 16:4001-14. 2008..This technique has demonstrated the capability for measuring of 3D geometry of various concave features, such as vertical, buried and other micro channels with sub-mum (RMS) measurement accuracy and repeatability...
- Microvalve thickness and topography measurements in microfluidic devices by white-light confocal microscopyShiguang Li
Singapore Masschusetts Institute of Technology Alliance, N3 2 01 36, 65 Nanyang Drive, Singapore 637460
Appl Opt 48:5088-94. 2009..With this technique, the microvalve thicknesses before and after bonding were characterized with submicrometer measurement sensitivity and about 1 microm measurement accuracy...
- Feasibility study on bonding quality inspection of microfluidic devices by optical coherence tomographyShiguang Li
Singapore MIT Alliance, N3 2 01 36, 65 Nanyang Drive, Singapore
J Biomed Opt 16:066011. 2011..The defects of geometry deformation and sealing completeness are emphasized during measurements. Based on the inspection results, some discoveries related to the production of microfluidic devices are discussed...