Hyug Gyo Rhee

Summary

Affiliation: Korea Research Institute of Standards and Science
Country: Korea

Publications

  1. doi request reprint 300 mm reference wafer fabrication by using direct laser lithography
    Hyug Gyo Rhee
    Space Optics Research Center, Korea Research Institute of Standards and Science, Daejeon 305 340, Republic of Korea
    Rev Sci Instrum 79:103103. 2008
  2. ncbi request reprint Absolute three-dimensional coordinate measurement by the two-point diffraction interferometry
    Hyug Gyo Rhee
    Space Optics Research Center, Korea Research Institute of Standards and Science, 1 Doryong dong, Yuseong Gu, Daejeon 305 340, Ref of Korea
    Opt Express 15:4435-44. 2007
  3. doi request reprint Enhancement of height resolution in direct laser lithography
    Hyug Gyo Rhee
    Centerfor Space Optics, Korea Research Institute of Standards and Science, Daejeon 305 340, South Korea
    Opt Express 20:291-8. 2012
  4. doi request reprint Realization and performance evaluation of high speed autofocusing for direct laser lithography
    Hyug Gyo Rhee
    Space Optics Research Center, Korea Research Institute of Standards and Science, Daejeon 305 340, Republic of Korea
    Rev Sci Instrum 80:073103. 2009
  5. doi request reprint Improvement of linewidth in laser beam lithographed computer generated hologram
    Hyug Gyo Rhee
    Centerfor Space Optics, Korea Research Institute of Standards and Science, Daejeon, South Korea
    Opt Express 18:1734-40. 2010
  6. ncbi request reprint Laser output power stabilization for direct laser writing system by using an acousto-optic modulator
    Dong Ik Kim
    Space Optics Research Center, Korea Research Institute of Standards and Science, 1 Doryong dong, Yuseong Gu, Daejeon 305 340, Republic of Korea
    Rev Sci Instrum 78:103110. 2007

Collaborators

  • Dong Ik Kim
  • Jae Bong Song
  • Yun Woo Lee

Detail Information

Publications6

  1. doi request reprint 300 mm reference wafer fabrication by using direct laser lithography
    Hyug Gyo Rhee
    Space Optics Research Center, Korea Research Institute of Standards and Science, Daejeon 305 340, Republic of Korea
    Rev Sci Instrum 79:103103. 2008
    ..Our method is able to fabricate a maximum 360-mm-diameter pattern with 651-nm-position uncertainty. The minimum pattern size is about 0.8 microm (linewidth value) and the maximum available height of the pattern is slightly over 400 nm...
  2. ncbi request reprint Absolute three-dimensional coordinate measurement by the two-point diffraction interferometry
    Hyug Gyo Rhee
    Space Optics Research Center, Korea Research Institute of Standards and Science, 1 Doryong dong, Yuseong Gu, Daejeon 305 340, Ref of Korea
    Opt Express 15:4435-44. 2007
    ..To extract the systematic error and verify the absolute performance of the interferometer we applied the Fourier self-calibration concept...
  3. doi request reprint Enhancement of height resolution in direct laser lithography
    Hyug Gyo Rhee
    Centerfor Space Optics, Korea Research Institute of Standards and Science, Daejeon 305 340, South Korea
    Opt Express 20:291-8. 2012
    ..By using this phenomenon, we are able to overcome the height limitation of direct laser lithography. The governing equations are also derived in this manuscript by using the Gaussian beam model...
  4. doi request reprint Realization and performance evaluation of high speed autofocusing for direct laser lithography
    Hyug Gyo Rhee
    Space Optics Research Center, Korea Research Institute of Standards and Science, Daejeon 305 340, Republic of Korea
    Rev Sci Instrum 80:073103. 2009
    ..The speed of the autofocusing was 150 Hz...
  5. doi request reprint Improvement of linewidth in laser beam lithographed computer generated hologram
    Hyug Gyo Rhee
    Centerfor Space Optics, Korea Research Institute of Standards and Science, Daejeon, South Korea
    Opt Express 18:1734-40. 2010
    ..Using this phenomenon, we can overcome the diffraction limit of the imaging lens and achieve a 486-nm-linewidth...
  6. ncbi request reprint Laser output power stabilization for direct laser writing system by using an acousto-optic modulator
    Dong Ik Kim
    Space Optics Research Center, Korea Research Institute of Standards and Science, 1 Doryong dong, Yuseong Gu, Daejeon 305 340, Republic of Korea
    Rev Sci Instrum 78:103110. 2007
    ..1 x 10(-7) Hz(-12) at 100 Hz. In addition, we applied our system to a 2 mW internal mirror He-Ne laser. As a consequence, we achieved the output power stability of +/-0.12% for 25 min...