- Removing nonlinearity of a homodyne interferometer by adjusting the gains of its quadrature detector systemsTaeho Keem
National Metrology Institute of Japan, National Institute of Advanced Industrial Science and Technology, Tsukuba Central 3, 1 1 1 Umezono, Tsukuba, Ibaraki 305 8563, Japan
Appl Opt 43:2443-8. 2004..01 nm when the detector gains are adjusted by simulation to include the optical characteristics. The compensated nonlinearity is 18 times smaller than that when the four detector gains are set to be equal...
- Simple, real-time method for removing the cyclic error of a homodyne interferometer with a quadrature detector systemTaeho Keem
National Metrology Institute of Japan, National Institute of Advanced Industrial Science and Technology, AIST Tsukuba Central 3, 1 1 1 Umezona, Tsukuba, Ibaraki 305 8563, Japan
Appl Opt 44:3492-8. 2005..Here we demonstrate the cyclic error correction method experimentally and show that the method can be applied in real time. We obtained 0.04-nm cyclic errors, with a standard deviation above 5 microm...