Leslie L Deck

Summary

Publications

  1. ncbi request reprint Fourier-transform phase-shifting interferometry
    Leslie L Deck
    Zygo Corporation, Laurel Brook Road, P O Box 448, Middlefield, Connecticut 06455 0448, USA
    Appl Opt 42:2354-65. 2003
  2. ncbi request reprint Suppressing phase errors from vibration in phase-shifting interferometry
    Leslie L Deck
    Zygo Corporation, Middlefield, Connecticut 06455, USA
    Appl Opt 48:3948-60. 2009

Detail Information

Publications2

  1. ncbi request reprint Fourier-transform phase-shifting interferometry
    Leslie L Deck
    Zygo Corporation, Laurel Brook Road, P O Box 448, Middlefield, Connecticut 06455 0448, USA
    Appl Opt 42:2354-65. 2003
    ..Basic system requirements are derived, common error sources are discussed, and the results of the measurements are compared with theory and alternative measurement methods...
  2. ncbi request reprint Suppressing phase errors from vibration in phase-shifting interferometry
    Leslie L Deck
    Zygo Corporation, Middlefield, Connecticut 06455, USA
    Appl Opt 48:3948-60. 2009
    ..Over a 100x reduction in vibrationally induced surface distortion is achieved for small amplitude vibrations on real data...