- Fourier-transform phase-shifting interferometryLeslie L Deck
Zygo Corporation, Laurel Brook Road, P O Box 448, Middlefield, Connecticut 06455 0448, USA
Appl Opt 42:2354-65. 2003..Basic system requirements are derived, common error sources are discussed, and the results of the measurements are compared with theory and alternative measurement methods...
- Suppressing phase errors from vibration in phase-shifting interferometryLeslie L Deck
Zygo Corporation, Middlefield, Connecticut 06455, USA
Appl Opt 48:3948-60. 2009..Over a 100x reduction in vibrationally induced surface distortion is achieved for small amplitude vibrations on real data...