Affiliation: Ghent University
- Trimming of silicon ring resonator by electron beam induced compaction and strainJ Schrauwen
Photonics Research Group, Department of Information Technology, Ghent University IMEC, B 9000 Gent, Belgium
Opt Express 16:3738-43. 2008..Volume compaction of the oxide cladding causes both changes in the refractive index and creates strain in the silicon lattice. We demonstrate a resonance wavelength red shift 4.91 nm in a silicon ring resonator...