DAVID L WINDT

Summary

Publications

  1. doi request reprint Performance, structure, and stability of SiC/Al multilayer films for extreme ultraviolet applications
    DAVID L WINDT
    Reflective X ray Optics LLC, 1361 Amsterdam Avenue, Suite 3B, New York, New York 10027, USA
    Appl Opt 48:4932-41. 2009

Detail Information

Publications1

  1. doi request reprint Performance, structure, and stability of SiC/Al multilayer films for extreme ultraviolet applications
    DAVID L WINDT
    Reflective X ray Optics LLC, 1361 Amsterdam Avenue, Suite 3B, New York, New York 10027, USA
    Appl Opt 48:4932-41. 2009
    ..SiC/Al multilayers deposited by reactive sputtering with nitrogen comprise Al layers that are nearly amorphous and considerably smoother than films deposited nonreactively, but no improvements in EUV reflectance were obtained...