Hao Yu

Summary

Affiliation: University of Michigan
Country: USA

Publications

  1. doi request reprint Accuracy of a multiple height-transfer interferometric technique for absolute distance metrology
    Hao Yu
    Department of Mechanical Engineering, University of Michigan, Ann Arbor, Michigan 48105, USA
    Appl Opt 51:5283-94. 2012
  2. doi request reprint A multiple height-transfer interferometric technique
    Hao Yu
    Department of Mechanical Engineering, University of Michigan, Ann Arbor, MI, 48105, USA
    Opt Express 19:16365-74. 2011

Detail Information

Publications2

  1. doi request reprint Accuracy of a multiple height-transfer interferometric technique for absolute distance metrology
    Hao Yu
    Department of Mechanical Engineering, University of Michigan, Ann Arbor, Michigan 48105, USA
    Appl Opt 51:5283-94. 2012
    ..The measurement uncertainty is experimentally demonstrated to be 0.3 μm over 50 mm for two discontinuous surfaces with a confidence level of 95% in a lab environment...
  2. doi request reprint A multiple height-transfer interferometric technique
    Hao Yu
    Department of Mechanical Engineering, University of Michigan, Ann Arbor, MI, 48105, USA
    Opt Express 19:16365-74. 2011
    ..By applying this technique with a proposed multiple height calibration artifact, we experimentally demonstrated accuracy better than 1 micron over 100 mm in a workshop environment...