- Accuracy of a multiple height-transfer interferometric technique for absolute distance metrologyHao Yu
Department of Mechanical Engineering, University of Michigan, Ann Arbor, Michigan 48105, USA
Appl Opt 51:5283-94. 2012..The measurement uncertainty is experimentally demonstrated to be 0.3 μm over 50 mm for two discontinuous surfaces with a confidence level of 95% in a lab environment...
- A multiple height-transfer interferometric techniqueHao Yu
Department of Mechanical Engineering, University of Michigan, Ann Arbor, MI, 48105, USA
Opt Express 19:16365-74. 2011..By applying this technique with a proposed multiple height calibration artifact, we experimentally demonstrated accuracy better than 1 micron over 100 mm in a workshop environment...