- Holographic voltage profiling on 75 nm gate architecture CMOS devicesAlexander E Thesen
Department of Physics, 401 Nielson Physics Bldg, University of Tennessee, Knoxville 37996, USA
Ultramicroscopy 94:277-81. 2003..The sample preparation using a dual beam system is discussed as well as details of the electron optical setup of the microscope. Special attention is given to the analysis of the reconstructed holograms...