Amyn Poonawala

Summary

Affiliation: University of California
Country: USA

Publications

  1. ncbi request reprint Mask design for optical microlithography--an inverse imaging problem
    Amyn Poonawala
    Computer Engineering Department, University of California, Santa Cruz, CA 95064, USA
    IEEE Trans Image Process 16:774-88. 2007

Detail Information

Publications1

  1. ncbi request reprint Mask design for optical microlithography--an inverse imaging problem
    Amyn Poonawala
    Computer Engineering Department, University of California, Santa Cruz, CA 95064, USA
    IEEE Trans Image Process 16:774-88. 2007
    ..We also employ the regularization framework to control the tone and complexity of the synthesized masks. Finally, we discuss the extension of our framework to coherent and (the more practical) partially coherent imaging systems...