Zhong Shi

Summary

Affiliation: Luna Innovations
Country: USA

Publications

  1. ncbi 193nm Superlens imaging structure for 20nm lithography node
    Zhong Shi
    Luna Innovations, Inc, Blacksburg, VA 24060, USA
    Opt Express 17:11309-14. 2009
  2. ncbi Depth-of-focus (DoF) analysis of a 193nm superlens imaging structure
    Zhong Shi
    Luna Innovations, Inc, 3157 State Street, Blacksburg, VA 24060, USA
    Opt Express 17:20538-45. 2009

Detail Information

Publications2

  1. ncbi 193nm Superlens imaging structure for 20nm lithography node
    Zhong Shi
    Luna Innovations, Inc, Blacksburg, VA 24060, USA
    Opt Express 17:11309-14. 2009
    ..Assistant features were adopted in superlens structure to successfully suppress the side lobes and resolve a 20nm two-slit structure...
  2. ncbi Depth-of-focus (DoF) analysis of a 193nm superlens imaging structure
    Zhong Shi
    Luna Innovations, Inc, 3157 State Street, Blacksburg, VA 24060, USA
    Opt Express 17:20538-45. 2009
    ....