- 193nm Superlens imaging structure for 20nm lithography nodeZhong Shi
Luna Innovations, Inc, Blacksburg, VA 24060, USA
Opt Express 17:11309-14. 2009..Assistant features were adopted in superlens structure to successfully suppress the side lobes and resolve a 20nm two-slit structure...
- Depth-of-focus (DoF) analysis of a 193nm superlens imaging structureZhong Shi
Luna Innovations, Inc, 3157 State Street, Blacksburg, VA 24060, USA
Opt Express 17:20538-45. 2009....