Regina Soufli

Summary

Affiliation: Lawrence Livermore National Laboratory
Country: USA

Publications

  1. doi request reprint Development and calibration of mirrors and gratings for the soft x-ray materials science beamline at the Linac Coherent Light Source free-electron laser
    Regina Soufli
    Lawrence Livermore National Laboratory, Livermore, California 94550, USA
    Appl Opt 51:2118-28. 2012
  2. ncbi request reprint Sub-diffraction-limited multilayer coatings for the 0.3 numerical aperture micro-exposure tool for extreme ultraviolet lithography
    Regina Soufli
    Lawrence Livermore National Laboratory, Livermore, California 94550, USA
    Appl Opt 46:3736-46. 2007
  3. doi request reprint Triple-wavelength, narrowband Mg/SiC multilayers with corrosion barriers and high peak reflectance in the 25-80 nm wavelength region
    Mónica Fernández-Perea
    Lawrence Livermore National Laboratory, 7000 East Avenue, Livermore, CA 94550, USA
    Opt Express 20:24018-29. 2012
  4. ncbi request reprint Physics of reflective optics for the soft gamma-ray photon energy range
    Mónica Fernández-Perea
    Lawrence Livermore National Laboratory LLNL, 7000 East Avenue, Livermore, California 94550, USA
    Phys Rev Lett 111:027404. 2013

Collaborators

  • Mónica Fernández-Perea
  • Jennifer Alameda
  • Eric Ziegler
  • Veijo Honkimaki
  • Tom J McCarville
  • Klaus P Ziock
  • Sherry L Baker
  • Marie Anne Descalle
  • Anders C Jakobsen
  • Michael J Pivovaroff
  • Finn E Christensen
  • Juan I Larruquert
  • Jeff C Robinson
  • Luis Rodríguez-de Marcos
  • Jose A Mendez
  • Eric M Gullikson

Detail Information

Publications4

  1. doi request reprint Development and calibration of mirrors and gratings for the soft x-ray materials science beamline at the Linac Coherent Light Source free-electron laser
    Regina Soufli
    Lawrence Livermore National Laboratory, Livermore, California 94550, USA
    Appl Opt 51:2118-28. 2012
    ..This is to our knowledge the first time B4C-coated diffraction gratings are demonstrated for operation in the soft x-ray region...
  2. ncbi request reprint Sub-diffraction-limited multilayer coatings for the 0.3 numerical aperture micro-exposure tool for extreme ultraviolet lithography
    Regina Soufli
    Lawrence Livermore National Laboratory, Livermore, California 94550, USA
    Appl Opt 46:3736-46. 2007
    ..07 waves rms). This work is an experimental demonstration of sub-diffraction- limited multilayer coatings for high-NA EUV imaging systems, which resulted in the highest resolution microfield EUV images to date...
  3. doi request reprint Triple-wavelength, narrowband Mg/SiC multilayers with corrosion barriers and high peak reflectance in the 25-80 nm wavelength region
    Mónica Fernández-Perea
    Lawrence Livermore National Laboratory, 7000 East Avenue, Livermore, CA 94550, USA
    Opt Express 20:24018-29. 2012
    ....
  4. ncbi request reprint Physics of reflective optics for the soft gamma-ray photon energy range
    Mónica Fernández-Perea
    Lawrence Livermore National Laboratory LLNL, 7000 East Avenue, Livermore, California 94550, USA
    Phys Rev Lett 111:027404. 2013
    ..Our results open up new possibilities of reflective optical designs in a spectral range where only diffractive optics (crystals and lenses) and crystal monochromators have been available until now. ..