Regina Soufli

Summary

Affiliation: Lawrence Livermore National Laboratory
Country: USA

Publications

  1. ncbi Development and calibration of mirrors and gratings for the soft x-ray materials science beamline at the Linac Coherent Light Source free-electron laser
    Regina Soufli
    Lawrence Livermore National Laboratory, Livermore, California 94550, USA
    Appl Opt 51:2118-28. 2012
  2. ncbi Sub-diffraction-limited multilayer coatings for the 0.3 numerical aperture micro-exposure tool for extreme ultraviolet lithography
    Regina Soufli
    Lawrence Livermore National Laboratory, Livermore, California 94550, USA
    Appl Opt 46:3736-46. 2007

Detail Information

Publications2

  1. ncbi Development and calibration of mirrors and gratings for the soft x-ray materials science beamline at the Linac Coherent Light Source free-electron laser
    Regina Soufli
    Lawrence Livermore National Laboratory, Livermore, California 94550, USA
    Appl Opt 51:2118-28. 2012
    ..This is to our knowledge the first time B4C-coated diffraction gratings are demonstrated for operation in the soft x-ray region...
  2. ncbi Sub-diffraction-limited multilayer coatings for the 0.3 numerical aperture micro-exposure tool for extreme ultraviolet lithography
    Regina Soufli
    Lawrence Livermore National Laboratory, Livermore, California 94550, USA
    Appl Opt 46:3736-46. 2007
    ..07 waves rms). This work is an experimental demonstration of sub-diffraction- limited multilayer coatings for high-NA EUV imaging systems, which resulted in the highest resolution microfield EUV images to date...