Shiguang Li

Summary

Affiliation: Nanyang Technological University
Country: Singapore

Publications

  1. ncbi request reprint Three dimensional sidewall measurements by laser fluorescent confocal microscopy
    Shiguang Li
    Singapore MIT Alliance, N3 2 01 36, 65 Nanyang Drive, Singapore 637460
    Opt Express 16:4001-14. 2008
  2. doi request reprint Microvalve thickness and topography measurements in microfluidic devices by white-light confocal microscopy
    Shiguang Li
    Singapore Masschusetts Institute of Technology Alliance, N3 2 01 36, 65 Nanyang Drive, Singapore 637460
    Appl Opt 48:5088-94. 2009
  3. doi request reprint Feasibility study on bonding quality inspection of microfluidic devices by optical coherence tomography
    Shiguang Li
    Singapore MIT Alliance, N3 2 01 36, 65 Nanyang Drive, Singapore
    J Biomed Opt 16:066011. 2011

Collaborators

Detail Information

Publications3

  1. ncbi request reprint Three dimensional sidewall measurements by laser fluorescent confocal microscopy
    Shiguang Li
    Singapore MIT Alliance, N3 2 01 36, 65 Nanyang Drive, Singapore 637460
    Opt Express 16:4001-14. 2008
    ..This technique has demonstrated the capability for measuring of 3D geometry of various concave features, such as vertical, buried and other micro channels with sub-mum (RMS) measurement accuracy and repeatability...
  2. doi request reprint Microvalve thickness and topography measurements in microfluidic devices by white-light confocal microscopy
    Shiguang Li
    Singapore Masschusetts Institute of Technology Alliance, N3 2 01 36, 65 Nanyang Drive, Singapore 637460
    Appl Opt 48:5088-94. 2009
    ..With this technique, the microvalve thicknesses before and after bonding were characterized with submicrometer measurement sensitivity and about 1 microm measurement accuracy...
  3. doi request reprint Feasibility study on bonding quality inspection of microfluidic devices by optical coherence tomography
    Shiguang Li
    Singapore MIT Alliance, N3 2 01 36, 65 Nanyang Drive, Singapore
    J Biomed Opt 16:066011. 2011
    ..The defects of geometry deformation and sealing completeness are emphasized during measurements. Based on the inspection results, some discoveries related to the production of microfluidic devices are discussed...