Jungjae Park

Summary

Affiliation: Korea Research Institute of Standards and Science
Country: Korea

Publications

  1. doi request reprint Modified Roberts-Langenbeck test for measuring thickness and refractive index variation of silicon wafers
    Jungjae Park
    National Institute of Standards and Technology, Physical Measurement Laboratory, 100 Bureau Drive, Gaithersburg, Maryland 20899 8220, USA
    Opt Express 20:20078-89. 2012

Detail Information

Publications1

  1. doi request reprint Modified Roberts-Langenbeck test for measuring thickness and refractive index variation of silicon wafers
    Jungjae Park
    National Institute of Standards and Technology, Physical Measurement Laboratory, 100 Bureau Drive, Gaithersburg, Maryland 20899 8220, USA
    Opt Express 20:20078-89. 2012
    ..The reliability of the method was further verified by comparing the measured thickness variation of a 150 mm diameter wafer to a measurement of the wafer flatness after bonding the wafer to an optical flat...