Affiliation: Korea Research Institute of Standards and Science
- Modified Roberts-Langenbeck test for measuring thickness and refractive index variation of silicon wafersJungjae Park
National Institute of Standards and Technology, Physical Measurement Laboratory, 100 Bureau Drive, Gaithersburg, Maryland 20899 8220, USA
Opt Express 20:20078-89. 2012..The reliability of the method was further verified by comparing the measured thickness variation of a 150 mm diameter wafer to a measurement of the wafer flatness after bonding the wafer to an optical flat...