Jonghan Jin

Summary

Affiliation: Korea Research Institute of Standards and Science
Country: Korea

Publications

  1. doi request reprint Precision depth measurement of through silicon vias (TSVs) on 3D semiconductor packaging process
    Jonghan Jin
    Center for Length, Korea Research Institute of Standards and Science, Daejeon, South Korea
    Opt Express 20:5011-6. 2012
  2. doi request reprint Thickness and refractive index measurement of a silicon wafer based on an optical comb
    Jonghan Jin
    Center for Length and Time, Division of Physical Metrology, Korea Research Institute of Standards and Science KRISS, Science Town, Daejeon, 305 340, Republic of Korea
    Opt Express 18:18339-46. 2010
  3. doi request reprint Visibility enhanced interferometer based on an injection-locking technique for low reflective materials
    Jonghan Jin
    Center for Length and Time, Division of Physical Metrology, Korea Research Institute of Standards and Science KRISS, 267 Gajeong ro, Yuseong Gu, Daejeon, 305 340, Korea
    Opt Express 18:23517-22. 2010
  4. doi request reprint Uncertainty improvement of geometrical thickness and refractive index measurement of a silicon wafer using a femtosecond pulse laser
    Saerom Maeng
    Center for Length, Division of Physical Metrology, Korea Research Institute of Standards and Science, 267 Gajeong ro, Yuseong Gu, Daejeon 305 340, South Korea
    Opt Express 20:12184-90. 2012
  5. doi request reprint Note: Nonlinearity error compensated absolute planar position measurement using a two-dimensional phase-encoded binary grating
    Jong Ahn Kim
    Center for Length, Korea Research Institute of Standards and Science, 267 Gajeong ro, Yuseong Gu, Daejeon 305 340, South Korea
    Rev Sci Instrum 84:056102. 2013
  6. doi request reprint An optical absolute position measurement method using a phase-encoded single track binary code
    Jong Ahn Kim
    Center for Length, Korea Research Institute of Standards and Science, 267 Gajeong ro, Yuseong Gu, Daejeon 305 340, South Korea
    Rev Sci Instrum 83:115115. 2012
  7. ncbi request reprint Note: High speed optical profiler based on a phase-shifting technique using frequency-scanning lasers
    Jong Ahn Kim
    Center for Length, Korea Research Institute of Standards and Science, Yuseong Gu, Daejeon, South Korea
    Rev Sci Instrum 82:086111. 2011
  8. ncbi request reprint Note: High precision angle generator using multiple ultrasonic motors and a self-calibratable encoder
    Jong Ahn Kim
    Center for Length, Korea Research Institute of Standards and Science, 267 Gajeong ro, Yuseong Gu, Daejeon 305 340, South Korea
    Rev Sci Instrum 82:116108. 2011
  9. ncbi request reprint A wide-range optical frequency generator based on the frequency comb of a femtosecond laser
    Young Jin Kim
    Billionth Uncertainty Precision Engineering Group, Korea Advanced Institute of Science and Technology KAIST, Science Town, Daejeon, 305 701, South Korea
    Opt Express 16:258-64. 2008

Collaborators

  • Jungjae Park
  • Jong Ahn Kim
  • Jae Wan Kim
  • Chu Shik Kang
  • Tae Bong Eom
  • Saerom Maeng
  • Young Jin Kim
  • Byungsung O
  • Cheon Eom
  • Roma Jang
  • Sangwon Hyun
  • Yunseok Kim
  • Seung Woo Kim

Detail Information

Publications9

  1. doi request reprint Precision depth measurement of through silicon vias (TSVs) on 3D semiconductor packaging process
    Jonghan Jin
    Center for Length, Korea Research Institute of Standards and Science, Daejeon, South Korea
    Opt Express 20:5011-6. 2012
    ..This measurement was done at high speed based on spectral resolved interferometry. The proposed method is expected to be an alternative method for depth inspection of TSVs...
  2. doi request reprint Thickness and refractive index measurement of a silicon wafer based on an optical comb
    Jonghan Jin
    Center for Length and Time, Division of Physical Metrology, Korea Research Institute of Standards and Science KRISS, Science Town, Daejeon, 305 340, Republic of Korea
    Opt Express 18:18339-46. 2010
    ..85 microm and 3.50, respectively. The measurement uncertainty for the geometrical thickness was evaluated as 0.95 microm (k = 1) using a preliminary setup...
  3. doi request reprint Visibility enhanced interferometer based on an injection-locking technique for low reflective materials
    Jonghan Jin
    Center for Length and Time, Division of Physical Metrology, Korea Research Institute of Standards and Science KRISS, 267 Gajeong ro, Yuseong Gu, Daejeon, 305 340, Korea
    Opt Express 18:23517-22. 2010
    ..6%, we obtained almost the same visibility as a metal coated mirror. The suggested visibility enhanced interferometer can be widely used for measuring low reflective materials...
  4. doi request reprint Uncertainty improvement of geometrical thickness and refractive index measurement of a silicon wafer using a femtosecond pulse laser
    Saerom Maeng
    Center for Length, Division of Physical Metrology, Korea Research Institute of Standards and Science, 267 Gajeong ro, Yuseong Gu, Daejeon 305 340, South Korea
    Opt Express 20:12184-90. 2012
    ..7 μm, which was an improvement of about 20 times that obtained by the previous method...
  5. doi request reprint Note: Nonlinearity error compensated absolute planar position measurement using a two-dimensional phase-encoded binary grating
    Jong Ahn Kim
    Center for Length, Korea Research Institute of Standards and Science, 267 Gajeong ro, Yuseong Gu, Daejeon 305 340, South Korea
    Rev Sci Instrum 84:056102. 2013
    ..Applying the proposed compensation method, the nonlinearity error was reduced to less than 15 nm...
  6. doi request reprint An optical absolute position measurement method using a phase-encoded single track binary code
    Jong Ahn Kim
    Center for Length, Korea Research Institute of Standards and Science, 267 Gajeong ro, Yuseong Gu, Daejeon 305 340, South Korea
    Rev Sci Instrum 83:115115. 2012
    ..In the comparison results with a laser interferometer, the measurement system shows the resolution of less than 50 nm and the nonlinearity error of less than ±60 nm after compensation...
  7. ncbi request reprint Note: High speed optical profiler based on a phase-shifting technique using frequency-scanning lasers
    Jong Ahn Kim
    Center for Length, Korea Research Institute of Standards and Science, Yuseong Gu, Daejeon, South Korea
    Rev Sci Instrum 82:086111. 2011
    ..We also present measurements of microscopic structures to verify the HSOP's ability to perform high speed inline inspection for the semiconductor and flat-panel display industries...
  8. ncbi request reprint Note: High precision angle generator using multiple ultrasonic motors and a self-calibratable encoder
    Jong Ahn Kim
    Center for Length, Korea Research Institute of Standards and Science, 267 Gajeong ro, Yuseong Gu, Daejeon 305 340, South Korea
    Rev Sci Instrum 82:116108. 2011
    ..The expanded uncertainty (k = 2) in the angle generation was estimated less than 0.03", which included the calibrated scale error and the nonlinearity error...
  9. ncbi request reprint A wide-range optical frequency generator based on the frequency comb of a femtosecond laser
    Young Jin Kim
    Billionth Uncertainty Precision Engineering Group, Korea Advanced Institute of Science and Technology KAIST, Science Town, Daejeon, 305 701, South Korea
    Opt Express 16:258-64. 2008
    ..These outstanding performances of optical frequency generation could find applications in high precision spectroscopy, frequency calibration, and length metrology...