Detail Information
Publications
Femtosecond laser direct writing of metallic microstructures by photoreduction of silver nitrate in a polymer matrixShoji Maruo
Department of Mechanical Engineering, Graduate School of Engineering, Yokohama National University, 79 5 Tokiwadai, Hodogaya ku, Yokohama 240 8501, Japan
Opt Express 16:1174-9. 2008..The 3-D direct laser writing of metallic microstructures has potential for application to 3-D electrical wiring of electronic devices and MEMS devices...
Single-anchor support and supercritical CO2 drying enable high-precision microfabrication of three-dimensional structuresShoji Maruo
Department of Mechanical Engineering, Graduate School of Engineering, Yokohama National University, 79 5 Tokiwadai, Hodogaya ku, Yokohama 240 8501, Japan
Opt Express 17:20945-51. 2009..The combination of supercritical CO(2) drying and the single-anchor supporting method offers reliable high-precision microfabrication of sophisticated, fragile 3-D micro/nano structures...
Optically driven micropump with a twin spiral microrotorShoji Maruo
Department of Mechanical Engineering, Graduate School of Engineering, Yokohama National University, 79 5 Tokiwadai, Hodogaya ku, Yokohama 240 8501, Japan
Opt Express 17:18525-32. 2009..Finally, a tandem micropump using two twin spiral microrotors was driven by a dual optical trapping system using a spatial light modulation technique...
