Shinji Yae

Summary

Affiliation: University of Hyogo
Country: Japan

Publications

  1. pmc Catalytic activity of noble metals for metal-assisted chemical etching of silicon
    Shinji Yae
    Department of Materials Science and Chemistry, Graduate School of Engineering, University of Hyogo, 2167 Shosha, Himeji, Hyogo, 671 2280, Japan
    Nanoscale Res Lett 7:352. 2012

Detail Information

Publications1

  1. pmc Catalytic activity of noble metals for metal-assisted chemical etching of silicon
    Shinji Yae
    Department of Materials Science and Chemistry, Graduate School of Engineering, University of Hyogo, 2167 Shosha, Himeji, Hyogo, 671 2280, Japan
    Nanoscale Res Lett 7:352. 2012
    ..The etching rate of the silicon and the catalytic activity of the metals for the cathodic reduction of oxygen in the hydrofluoric acid solution increase in the order of silver, gold, platinum, and rhodium...