Affiliation: University of Hyogo
- Catalytic activity of noble metals for metal-assisted chemical etching of siliconShinji Yae
Department of Materials Science and Chemistry, Graduate School of Engineering, University of Hyogo, 2167 Shosha, Himeji, Hyogo, 671 2280, Japan
Nanoscale Res Lett 7:352. 2012..The etching rate of the silicon and the catalytic activity of the metals for the cathodic reduction of oxygen in the hydrofluoric acid solution increase in the order of silver, gold, platinum, and rhodium...