Tetsuya Hoshino

Summary

Affiliation: University of Tsukuba
Country: Japan

Publications

  1. ncbi Diffraction pattern of triangular grating in the resonance domain
    Tetsuya Hoshino
    Institute of Applied Physics, University of Tsukuba, Tsukuba, Japan
    J Opt Soc Am A Opt Image Sci Vis 26:715-22. 2009
  2. ncbi Precise and rapid distance measurements by scatterometry
    Tetsuya Hoshino
    Institute of Applied Physics, University of Tsukuba, 1 1 1 Tennoudai, Tsukuba 305 8577, Japan
    Opt Express 20:3954-66. 2012

Detail Information

Publications2

  1. ncbi Diffraction pattern of triangular grating in the resonance domain
    Tetsuya Hoshino
    Institute of Applied Physics, University of Tsukuba, Tsukuba, Japan
    J Opt Soc Am A Opt Image Sci Vis 26:715-22. 2009
    ....
  2. ncbi Precise and rapid distance measurements by scatterometry
    Tetsuya Hoshino
    Institute of Applied Physics, University of Tsukuba, 1 1 1 Tennoudai, Tsukuba 305 8577, Japan
    Opt Express 20:3954-66. 2012
    ..We used rigorous coupled-wave analysis to calculate the diffraction intensity. Some of the results were verified by nonstandard finite-difference time-domain simulations and experiments...