Affiliation: Tokyo University of Agriculture and Technology
- Frequency-comb-based interferometer for profilometry and tomographySamuel Choi
Department of Technology, Tokyo University of Agriculture and Technology, Koganei Shi, Tokyo, Japan
Opt Lett 31:1976-8. 2006..Surface profile measurement is performed by sweeping the comb interval frequency without mechanical scanning. Step heights of 0.5 and 1.0 mm are successfully measured by use of the scheme with 9 mum accuracy...