Ichiko Misumi

Summary

Affiliation: National Institute of Advanced Industrial Science and Technology
Country: Japan

Publications

  1. ncbi request reprint Simple, real-time method for removing the cyclic error of a homodyne interferometer with a quadrature detector system
    Taeho Keem
    National Metrology Institute of Japan, National Institute of Advanced Industrial Science and Technology, AIST Tsukuba Central 3, 1 1 1 Umezona, Tsukuba, Ibaraki 305 8563, Japan
    Appl Opt 44:3492-8. 2005

Collaborators

  • Taeho Keem
  • Qianxiang Huang
  • Tomizo Kurosawa
  • Satoshi Gonda

Detail Information

Publications1

  1. ncbi request reprint Simple, real-time method for removing the cyclic error of a homodyne interferometer with a quadrature detector system
    Taeho Keem
    National Metrology Institute of Japan, National Institute of Advanced Industrial Science and Technology, AIST Tsukuba Central 3, 1 1 1 Umezona, Tsukuba, Ibaraki 305 8563, Japan
    Appl Opt 44:3492-8. 2005
    ..Here we demonstrate the cyclic error correction method experimentally and show that the method can be applied in real time. We obtained 0.04-nm cyclic errors, with a standard deviation above 5 microm...