- Low-coherence interferometer system for the simultaneous measurement of refractive index and thicknessHideki Maruyama
Research and Development Laboratory, Kyushu Matsushita Electric Company, Ltd, Fukuoka, Japan
Appl Opt 41:1315-22. 2002..In addition, a measurement accuracy of less than 1% is achieved even when the sample is as thin as 20 microm. The measurement time is also 3 min or more...