Affiliation: Kogakuin University
- Triangle pore arrays fabricated on Si (111) substrate by sphere lithography combined with metal-assisted chemical etching and anisotropic chemical etchingHidetaka Asoh
Department of Applied Chemistry, Kogakuin University, 2665 1 Nakano, Hachioji, Tokyo, 192 0015, Japan
Nanoscale Res Lett 7:406. 2012..In the anisotropic etching in TMAH, the macropores changed from being circular to being hexagonal and finally to being triangular, owing to the difference in etching rate between the crystal planes...