- Aspects for calculating local absorption with the rigorous coupled-wave methodKarl Heinz Brenner
University of Heidelberg, B6, 23 29 68131 Mannheim, Germany
Opt Express 18:10369-76. 2010..The results for these field definitions agree very accurately with results obtained by the law of conservation of energy. We present some examples which are typical for the application scenarios of lithography and detectors...