Detail Information
Publications
Optical characterization of photonic crystal slabs using orthogonally oriented polarization filtersYousef Nazirizadeh
Light Technology Institute, Universitat Karlsruhe TH, Engesser Str 13, 76131 Karlsruhe, Germany
Opt Express 16:7153-60. 2008..Stitching errors and inhomogeneities in exposure dose down to 1.3% in photonic crystal slabs fabricated by electron beam lithography are observed using this method...
