Lorenz Stuerzebecher

Summary

Affiliation: Fraunhofer Institute of Toxicology and Experimental Medicine
Country: Germany

Publications

  1. doi request reprint Advanced mask aligner lithography: fabrication of periodic patterns using pinhole array mask and Talbot effect
    Lorenz Stuerzebecher
    Fraunhofer Institut für Angewandte Optik und Feinmechanik IOF, Jena, Germany
    Opt Express 18:19485-94. 2010

Detail Information

Publications1

  1. doi request reprint Advanced mask aligner lithography: fabrication of periodic patterns using pinhole array mask and Talbot effect
    Lorenz Stuerzebecher
    Fraunhofer Institut für Angewandte Optik und Feinmechanik IOF, Jena, Germany
    Opt Express 18:19485-94. 2010
    ..The proposed method comprises high flexibility and sub-micron resolution at large proximity gaps. Various periodic structures have been generated and are presented...