- Direct electron imaging in electron microscopy with monolithic active pixel sensorsG Deptuch
Brookhaven National Laboratory, Upton, NY 11973, USA
Ultramicroscopy 107:674-84. 2007..The electron energies used range from a few keV to 30 keV for SEM and from 40 to 400 keV for TEM. Deterioration of the image resolution due to backscattering was quantified for different energies and both detector versions...