Leslie L Deck

Summary

Publications

  1. ncbi request reprint Suppressing phase errors from vibration in phase-shifting interferometry
    Leslie L Deck
    Zygo Corporation, Middlefield, Connecticut 06455, USA
    Appl Opt 48:3948-60. 2009

Detail Information

Publications1

  1. ncbi request reprint Suppressing phase errors from vibration in phase-shifting interferometry
    Leslie L Deck
    Zygo Corporation, Middlefield, Connecticut 06455, USA
    Appl Opt 48:3948-60. 2009
    ..Over a 100x reduction in vibrationally induced surface distortion is achieved for small amplitude vibrations on real data...