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Broadband multilayer-coated normal incidence blazed grating with approximately 10% diffraction efficiency through the 13-16 nm wavelength regionLichao Zhang
State Key Lab of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun, China
Opt Lett 34:818-20. 2009..At an incidence angle of 10 degrees, the -2nd-order diffraction efficiency of the multilayer grating is approximately 10% through the wavelength range of 13-16 nm...
