Affiliation: Nankai University
- Electrical and optical properties of Al-doped ZnO and ZnAl2O4 films prepared by atomic layer depositionQiongqiong Hou
Key Laboratory of Weak Light Nonlinear Photonics, Ministry of Education, School of Physics, Nankai University, Weijin Road 94, Tianjin, 300071, China
Nanoscale Res Lett 8:144. 2013..It was found that pure ZnAl2O4 film was synthesized by annealing the specific composite film containing alternative monocycle of ZnO and Al2O3 sublayers, which could only be deposited precisely by utilizing ALD technology...