- Design, fabrication and levitation experiments of a micromachined electrostatically suspended six-axis accelerometerFeng Cui
National Key Laboratory of Science and Technology on Nano Micro Fabrication Technology, Research Institute of Micro Nano Science and Technology, Shanghai Jiao Tong University, 800 Dongchuan Road, Shanghai 200240, China
Sensors (Basel) 11:11206-34. 2011....
- Compact Hinfinity robust rebalance loop controller design for a micromachined electrostatically suspended gyroscopeGaoyin Ma
National Key Laboratory of Nano Micro Fabrication Technology, Key Laboratory for Thin Film and Microfabrication of Ministry of Education, Institute of Micro and Nano Science and Technology, Shanghai Jiao Tong University, Shanghai, 200240, China
ISA Trans 49:222-8. 2010....