Isabel Van Driessche
Affiliation: Ghent University
- A new procedure to seal the pores of mesoporous low-k films with precondensed organosilica oligomersFrederik Goethals
Department of Inorganic and Physical Chemistry, Ghent University, Krijgslaan 281, building S3, 9000 Ghent, Belgium
Chem Commun (Camb) 48:2797-9. 2012..A new strategy to seal mesoporous low-k thin films with a pore size of 3 nm has been developed. This is achieved by spin-coating of a self-assembled carbon-bridged organosilica layer followed by a grafting with hexamethyl disilazane...